Poröse Polyurethanpolierkissen
EP 60 2004 047 904.7 - B24B 37/24. AT 27.07.2004; OT 02.02.2005; PT 16.09.2015. Anm.: Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, Del., US. Erf.: Fawcett, Clyde A., Claymont, DE 19703, US; Crkvenac, T. Todd, Hockessin, DE 19707, US; Prygon, Kenneth A., Bear, DE 19701, US; Foster, Bernard, Elkton, MD 21921, US.