In situ Kammer zur Trockenreinigung bei der Vorbehandlung von Substraten
EP 60 2005 044 262.6 – C23C 16/02. AT 25.02.2005; OT 31.08.2005; PT 23.07.2014. Anm.: Applied Materials, Inc., Santa Clara, Calif., US. Erf.: Lai, Chiukin (Steven), Sunnyvale, California 94087, US, Umotoy, Sal, Antioch, California 94509, US, Kao, Chien-Teh, Sunnyvale, California 98086, US, Chang, Mei, Saratoga, California 95070-3711, US, Phan, See-Eng, San Jose, California 95129, US, Wang, Wie W., Cupertino, California 95014, US, Huston, Joel M., San Jose, California 95124, US, Lu, Xinliang, Sunnyvale, California 94087, US, Yuan, Xiaoxiong (John), Cupertino, California 95132, US, Chou, Jing-Pei (Connie), Sunnyvale, California 94086, US, Chang, Yu, San Jose, California 95129, US, Trinh, Son, Cupertino, California 95014, US.